TY  - RPRT
TI  - Study of depth profile of hydrogen in hydrogenated diamond like carbon thin film using ion beam analysis techniques
AU  - J Datta
AU  - H S Biswas
AU  - P Rao
AU  - G L N Reddy
AU  - S Kumar
AU  - N R Ray
AU  - D P Chowdhury
AU  - A V R Reddy
PY  - 2013
DO  - 10.1016/j.nimb.2014.02.127
UR  - https://arxiv.org/abs/1311.7463
ID  - 1311.7463
ER  -