@misc{indiciaef481aa6f3d26,
  title = {Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium},
  author = {Christian Maszl and Wolfgang Breilmann and Jan Benedikt and Achim von Keudell},
  year = {2014},
  doi = {10.1088/0022-3727/47/22/224002},
  url = {https://arxiv.org/abs/1311.7545},
  note = {Source identifier: 1311.7545}
}