TY  - RPRT
TI  - Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium
AU  - Christian Maszl
AU  - Wolfgang Breilmann
AU  - Jan Benedikt
AU  - Achim von Keudell
PY  - 2014
DO  - 10.1088/0022-3727/47/22/224002
UR  - https://arxiv.org/abs/1311.7545
ID  - 1311.7545
ER  -