@misc{indiciaed62ea7784464,
  title = {Metallic coatings of MEMS at low temperatures: stress, elasticity and non-linear dissipation},
  author = {Eddy Collin and Johannes Kofler and Sabine Lakhloufi and Sebastien Pairis and Yuriy M. Bunkov and Henri Godfrin},
  year = {2013},
  url = {https://arxiv.org/abs/1312.4501},
  note = {Source identifier: 1312.4501}
}