@misc{indiciaea58a5b412091,
  title = {Characterization of low-temperature microwave loss of thin aluminum oxide formed by plasma oxidation},
  author = {Chunqing Deng and Martin Otto and Adrian Lupascu},
  year = {2013},
  doi = {10.1063/1.4863686},
  url = {https://arxiv.org/abs/1312.7362},
  note = {Source identifier: 1312.7362}
}