TY  - RPRT
TI  - Characterization of low-temperature microwave loss of thin aluminum oxide formed by plasma oxidation
AU  - Chunqing Deng
AU  - Martin Otto
AU  - Adrian Lupascu
PY  - 2013
DO  - 10.1063/1.4863686
UR  - https://arxiv.org/abs/1312.7362
ID  - 1312.7362
ER  -