@misc{indiciae69f5df5795c7,
  title = {Comparison of Analytical and Numerical Resolution Functions in Sputter Depth Profiling},
  author = {S. Hofmann and Y. Liu and J. Y. Wang and J. Kovac},
  year = {2014},
  url = {https://arxiv.org/abs/1401.1014},
  note = {Source identifier: 1401.1014}
}