@misc{indiciaeeeb43203c12d,
  title = {Determination of Doping and Temperature Dependent Elastic Constants of Degenerately Doped Silicon from MEMS Resonators},
  author = {Antti Jaakkola and Mika Prunnila and Tuomas Pensala and James Dekker and Panu Pekko},
  year = {2014},
  doi = {10.1109/tuffc.2014.3007},
  url = {https://arxiv.org/abs/1401.1363},
  note = {Source identifier: 1401.1363}
}