TY  - RPRT
TI  - Determination of Doping and Temperature Dependent Elastic Constants of Degenerately Doped Silicon from MEMS Resonators
AU  - Antti Jaakkola
AU  - Mika Prunnila
AU  - Tuomas Pensala
AU  - James Dekker
AU  - Panu Pekko
PY  - 2014
DO  - 10.1109/tuffc.2014.3007
UR  - https://arxiv.org/abs/1401.1363
ID  - 1401.1363
ER  -