@misc{indiciae49d7236aa50b,
  title = {Development of a NbN Deposition Process for Superconducting Quantum Sensors},
  author = {D. M. Glowacka and D. J. Goldie and S. Withington and H. Muhammad and G. Yassin and B. K. Tan},
  year = {2014},
  url = {https://arxiv.org/abs/1401.2292},
  note = {Source identifier: 1401.2292}
}