@misc{indiciae0e3b12469fbb, title = {Thickness Estimation of the Si Thin Films: a Simulation Study}, author = {Mohammad Babazadeh and Abdollah Rahmat Nezamabad and Hossein Movla and Farzad Ghafari Jouneghani}, year = {2014}, doi = {10.1016/j.ijleo.2015.02.059}, url = {https://arxiv.org/abs/1401.4139}, note = {Source identifier: 1401.4139} }