@misc{indiciaedf183ff08b70, title = {Low-loss, silicon integrated, aluminum nitride photonic circuits and their use for electro-optic signal processing}, author = {Chi Xiong and Wolfram H. P. Pernice and Hong X. Tang}, year = {2014}, doi = {10.1021/nl3011885}, url = {https://arxiv.org/abs/1401.4768}, note = {Source identifier: 1401.4768} }