@misc{indiciae3775986b425c,
  title = {Software Architecture and Subclassing Technique for Semiconductor Manufacturing Machines},
  author = {HyungTae Kim and HaeJeong Yang},
  year = {2014},
  doi = {10.7321/jscse.v2.n12.1},
  url = {https://arxiv.org/abs/1401.6125},
  note = {Source identifier: 1401.6125}
}