@misc{indiciaea86fcbafcbfd,
  title = {L-Shape based Layout Fracturing for E-Beam Lithography},
  author = {Bei Yu and Jhih-Rong Gao and David Z. Pan},
  year = {2014},
  doi = {10.1109/aspdac.2013.6509604},
  url = {https://arxiv.org/abs/1402.2420},
  note = {Source identifier: 1402.2420}
}