TY  - RPRT
TI  - L-Shape based Layout Fracturing for E-Beam Lithography
AU  - Bei Yu
AU  - Jhih-Rong Gao
AU  - David Z. Pan
PY  - 2014
DO  - 10.1109/aspdac.2013.6509604
UR  - https://arxiv.org/abs/1402.2420
ID  - 1402.2420
ER  -