TY  - RPRT
TI  - Triple Patterning Lithography (TPL) Layout Decomposition using End-Cutting
AU  - Bei Yu
AU  - Jhih-Rong Gao
AU  - David Z. Pan
PY  - 2014
DO  - 10.1117/12.2011355
UR  - https://arxiv.org/abs/1402.2425
ID  - 1402.2425
ER  -