@misc{indiciae68613e6143b2,
  title = {Layout decomposition for triple patterning lithography},
  author = {Bei Yu and Kun Yuan and Boyang Zhang and Duo Ding and David Z. Pan},
  year = {2014},
  doi = {10.1109/iccad.2011.6105297},
  url = {https://arxiv.org/abs/1402.2459},
  note = {Source identifier: 1402.2459}
}