TY - RPRT TI - A High-Performance Triple Patterning Layout Decomposer with Balanced Density AU - Bei Yu AU - Yen-Hung Lin AU - Gerard Luk-Pat AU - Duo Ding AU - Kevin Lucas AU - David Z. Pan PY - 2014 UR - https://arxiv.org/abs/1402.2890 ID - 1402.2890 ER -