@misc{indiciae942088da278b, title = {Smoothing of Discharge Inhomogeneities at High Currents in Gasless High Power Impulse Magnetron Sputtering}, author = {Joakim Andersson and Pavel Ni and André Anders}, year = {2014}, doi = {10.1109/tps.2014.2334600}, url = {https://arxiv.org/abs/1402.2921}, note = {Source identifier: 1402.2921} }