TY  - RPRT
TI  - Smoothing of Discharge Inhomogeneities at High Currents in Gasless High Power Impulse Magnetron Sputtering
AU  - Joakim Andersson
AU  - Pavel Ni
AU  - André Anders
PY  - 2014
DO  - 10.1109/tps.2014.2334600
UR  - https://arxiv.org/abs/1402.2921
ID  - 1402.2921
ER  -