@misc{indiciaec471fd35a6d1,
  title = {Drifting Ionization Zone in Sputtering Magnetron Discharges at Very Low Currents},
  author = {André Anders and Pavel Ni and Joakim Andersson},
  year = {2014},
  doi = {10.1109/tps.2014.2334601},
  url = {https://arxiv.org/abs/1402.2951},
  note = {Source identifier: 1402.2951}
}