TY  - RPRT
TI  - Drifting Ionization Zone in Sputtering Magnetron Discharges at Very Low Currents
AU  - André Anders
AU  - Pavel Ni
AU  - Joakim Andersson
PY  - 2014
DO  - 10.1109/tps.2014.2334601
UR  - https://arxiv.org/abs/1402.2951
ID  - 1402.2951
ER  -