@misc{indiciae1d6f9d97e992, title = {Polishing of \{100\} and \{111\} single crystal diamond through the use of Chemical Mechanical Polishing}, author = {Evan L. H. Thomas and Soumen Mandal and Emmanuel B. Brousseau and Oliver A. Williams}, year = {2014}, doi = {10.1088/1468-6996/15/3/035013}, url = {https://arxiv.org/abs/1402.3446}, note = {Source identifier: 1402.3446} }