TY  - RPRT
TI  - Polishing of {100} and {111} single crystal diamond through the use of Chemical Mechanical Polishing
AU  - Evan L. H. Thomas
AU  - Soumen Mandal
AU  - Emmanuel B. Brousseau
AU  - Oliver A. Williams
PY  - 2014
DO  - 10.1088/1468-6996/15/3/035013
UR  - https://arxiv.org/abs/1402.3446
ID  - 1402.3446
ER  -