@misc{indiciae57c4048d29b2,
  title = {Fabrication of sub-15nm aluminum wires by controlled etching},
  author = {T. Morgan-Wall and H. J. Hughes and N. Hartman and T. M. McQueen and N. Markovic},
  year = {2014},
  doi = {10.1063/1.4874137},
  url = {https://arxiv.org/abs/1402.5838},
  note = {Source identifier: 1402.5838}
}