@misc{indiciae31a3bc275ae5,
  title = {Using top graphene layer as sacrificial protection during dielectric atomic layer deposition},
  author = {Xiaohui Tang and Nicolas Reckinger and Olivier Poncelet and Pierre Louette and Jean-François Colomer and Jean-Pierre Raskin and Benoit Hackens and Laurent A. Francis},
  year = {2014},
  url = {https://arxiv.org/abs/1403.3787},
  note = {Source identifier: 1403.3787}
}