TY  - RPRT
TI  - Integrating Atomic Layer Deposition and Ultra-High Vacuum Physical Vapor Deposition for In Situ Fabrication of Tunnel Junctions
AU  - Alan J. Elliot
AU  - Gary A. Malek
AU  - Rongtao Lu
AU  - Siyuan Han
AU  - Haifeng Yiu
AU  - Shiping Zhao
AU  - Judy Z. Wu
PY  - 2014
DO  - 10.1063/1.4890286
UR  - https://arxiv.org/abs/1405.1069
ID  - 1405.1069
ER  -