@misc{indiciaeacb11b159609, title = {Dispersion engineering of high-Q silicon microresonators via thermal oxidation}, author = {Wei C. Jiang and Jidong Zhang and Nicholas G. Usechak and Qiang Lin}, year = {2014}, doi = {10.1063/1.4890986}, url = {https://arxiv.org/abs/1405.1224}, note = {Source identifier: 1405.1224} }