TY - RPRT TI - Dispersion engineering of high-Q silicon microresonators via thermal oxidation AU - Wei C. Jiang AU - Jidong Zhang AU - Nicholas G. Usechak AU - Qiang Lin PY - 2014 DO - 10.1063/1.4890986 UR - https://arxiv.org/abs/1405.1224 ID - 1405.1224 ER -