TY - RPRT TI - Integrated silicon optomechanical transducers and their application in atomic force microscopy AU - Jie Zou AU - Marcelo Davanco AU - Yuxiang Liu AU - Thomas Michels AU - Kartik Srinivasan AU - Vladimir Aksyuk PY - 2014 UR - https://arxiv.org/abs/1405.3343 ID - 1405.3343 ER -