@misc{indiciaec97c1ebb0b8a,
  title = {Self-aligned process for forming microlenses at the tips of vertical silicon nanowires by atomic layer deposition},
  author = {Yaping Dan and Kaixiang Chen and Kenneth B. Crozier},
  year = {2014},
  doi = {10.1116/1.4897221},
  url = {https://arxiv.org/abs/1405.4741},
  note = {Source identifier: 1405.4741}
}