TY  - RPRT
TI  - Self-aligned process for forming microlenses at the tips of vertical silicon nanowires by atomic layer deposition
AU  - Yaping Dan
AU  - Kaixiang Chen
AU  - Kenneth B. Crozier
PY  - 2014
DO  - 10.1116/1.4897221
UR  - https://arxiv.org/abs/1405.4741
ID  - 1405.4741
ER  -