@misc{indiciae007315dac675, title = {Ultrasensitive measurement of MEMS cantilever displacement sensitivity below the shot noise limit}, author = {R. C. Pooser and B. J. Lawrie}, year = {2015}, doi = {10.1364/optica.2.000393}, url = {https://arxiv.org/abs/1405.4767}, note = {Source identifier: 1405.4767} }