@misc{indiciae9cc2bdacfa69,
  title = {Waveguide-mode interference lithography technique for high contrast subwavelength structures in the visible region},
  author = {Kanta Kusaka and Hiroyuki Kurosawa and Seigo Ohno and Yozaburo Sakaki and Kazuyuki Nakayama and Yuto Moritake and Teruya Ishihara},
  year = {2014},
  doi = {10.1364/oe.22.018748},
  url = {https://arxiv.org/abs/1405.5395},
  note = {Source identifier: 1405.5395}
}