TY  - RPRT
TI  - Waveguide-mode interference lithography technique for high contrast subwavelength structures in the visible region
AU  - Kanta Kusaka
AU  - Hiroyuki Kurosawa
AU  - Seigo Ohno
AU  - Yozaburo Sakaki
AU  - Kazuyuki Nakayama
AU  - Yuto Moritake
AU  - Teruya Ishihara
PY  - 2014
DO  - 10.1364/oe.22.018748
UR  - https://arxiv.org/abs/1405.5395
ID  - 1405.5395
ER  -