@misc{indiciaef2815f888133,
  title = {Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro- and nanomechanical resonators},
  author = {Luis Guillermo Villanueva and Silvan Schmid},
  year = {2014},
  doi = {10.1103/physrevlett.113.227201},
  url = {https://arxiv.org/abs/1405.6115},
  note = {Source identifier: 1405.6115}
}