TY  - RPRT
TI  - Evidence of surface loss as ubiquitous limiting damping mechanism in SiN micro- and nanomechanical resonators
AU  - Luis Guillermo Villanueva
AU  - Silvan Schmid
PY  - 2014
DO  - 10.1103/physrevlett.113.227201
UR  - https://arxiv.org/abs/1405.6115
ID  - 1405.6115
ER  -