@misc{indiciaecb13a90fa326,
  title = {Computerized Langmuir Probe Measurements in a Capacitively Coupled RF Discharge},
  author = {M. El Shaer and A. S. Mohamed and A. Massoud and M. Mobasher and M. Wuttmann},
  year = {2014},
  url = {https://arxiv.org/abs/1406.5632},
  note = {Source identifier: 1406.5632}
}