@misc{indiciae95e123097792, title = {Photonic Crystal Microcavities in a Microelectronics 45nm SOI CMOS Technology}, author = {Christopher V. Poulton and Xiaoge Zeng and Mark T. Wade and Jeffrey M. Shainline and Jason S. Orcutt and Milos A. Popovic}, year = {2014}, doi = {10.1109/lpt.2015.2389840}, url = {https://arxiv.org/abs/1406.5753}, note = {Source identifier: 1406.5753} }