@misc{indiciae66462acb1236,
  title = {Impact of nitrogen incorporation on interface states in (100)Si/HfO2},
  author = {Y. G. Fedorenko and L. Truong and V. V. Afanas'ev and A. Stesmans and Z. Zhang and S. A. Campbell},
  year = {2014},
  url = {https://arxiv.org/abs/1406.6609},
  note = {Source identifier: 1406.6609}
}