@misc{indiciaebd040b059bac,
  title = {Oblique Angle Deposition of HfO2 Thin Films: Investigation of Elastic and Micro Structural Properties},
  author = {R B Tokas and S Jena and P Sarkar and Shyam polaki and S Thakur and S Basu and N K Sahoo},
  year = {2014},
  url = {https://arxiv.org/abs/1406.6858},
  note = {Source identifier: 1406.6858}
}