TY  - RPRT
TI  - Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating
AU  - Jan Wernecke
AU  - Michael Krumrey
AU  - Armin Hoell
AU  - R. Joseph Kline
AU  - Hung-kung Liu
AU  - Wen-li Wu
PY  - 2014
UR  - https://arxiv.org/abs/1407.8305
ID  - 1407.8305
ER  -