@misc{indiciae38ea486eeed4, title = {Cryogenic Dark Matter Search Detector Fabrication Process and Recent Improvements}, author = {Andrew Jastram and Rusty Harris and Rupak Mahapatra and James Phillips and Mark Platt and Kunj Prasad and Joel Sander and Sriteja Upadhyayula}, year = {2014}, doi = {10.1016/j.nima.2014.10.043}, url = {https://arxiv.org/abs/1408.0295}, note = {Source identifier: 1408.0295} }