@misc{indiciaef35c7804ffd4, title = {Controlling the thickness of Josephson tunnel barriers with atomic layer deposition}, author = {Alan J. Elliot and Chunrui Ma and Rongtao Lu and Melisa Xin and Siyuan Han and Judy Z. Wu and Ridwan Sakidja and Haifeng Yu}, year = {2014}, url = {https://arxiv.org/abs/1408.3077}, note = {Source identifier: 1408.3077} }