@misc{indiciaec35e4c698078,
  title = {Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al-AlOx/Nb Josephson Junctions for VLSI Circuits},
  author = {Sergey K. Tolpygo and Vladimir Bolkhovsky and Terence J. Weir and Leonard M. Johnson and Mark A. Gouker and William D. Oliver},
  year = {2014},
  doi = {10.1109/tasc.2014.2374836},
  url = {https://arxiv.org/abs/1408.5829},
  note = {Source identifier: 1408.5829}
}