TY  - RPRT
TI  - Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al-AlOx/Nb Josephson Junctions for VLSI Circuits
AU  - Sergey K. Tolpygo
AU  - Vladimir Bolkhovsky
AU  - Terence J. Weir
AU  - Leonard M. Johnson
AU  - Mark A. Gouker
AU  - William D. Oliver
PY  - 2014
DO  - 10.1109/tasc.2014.2374836
UR  - https://arxiv.org/abs/1408.5829
ID  - 1408.5829
ER  -