@misc{indiciae39a4f8ca3509,
  title = {In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon},
  author = {O. Tokel and A. Turnali and G. Makey and P. Elahi and S. Ilday and T. Çolakoğlu and E. Ergeçen and Ö. Yavuz and R. Hübner and M. Z. Borra and I. Pavlov and A. Bek and R. Turan and S. Tozburun and F. Ö. Ilday},
  year = {2017},
  url = {https://arxiv.org/abs/1409.2827},
  note = {Source identifier: 1409.2827}
}