@misc{indiciaebefb0f5131d5,
  title = {Growth Kinetic studies of ion beam sputtered AlN-thin films: Effect of reactive assistance of nitrogen plasma},
  author = {Neha Sharma and K. Prabhakar and S. Ilango and S. Dash and A. K. Tyagi},
  year = {2014},
  doi = {10.1016/j.apsusc.2015.04.151},
  url = {https://arxiv.org/abs/1409.5618},
  note = {Source identifier: 1409.5618}
}