TY  - RPRT
TI  - Growth Kinetic studies of ion beam sputtered AlN-thin films: Effect of reactive assistance of nitrogen plasma
AU  - Neha Sharma
AU  - K. Prabhakar
AU  - S. Ilango
AU  - S. Dash
AU  - A. K. Tyagi
PY  - 2014
DO  - 10.1016/j.apsusc.2015.04.151
UR  - https://arxiv.org/abs/1409.5618
ID  - 1409.5618
ER  -