@misc{indiciaeb29c03fdf33c, title = {Effect of the flash annealing on the impurity distribution and the electronic structure in the inversion layer}, author = {Tomohiro Sakata and Sakura N Takeda and Makoto Morita and Nur I Ayob and Hiroki Tabata and Hironori Matsuoka and Hiroshi Daimon}, year = {2014}, url = {https://arxiv.org/abs/1409.7043}, note = {Source identifier: 1409.7043} }